Dependence of Photoluminescence from a-Si Films fabricated by TEOS on Composition (8.3)

Presentation information

Regular sessions(Poster presentation)

08. Plasma Electronics » 8. Plasma Electronics

Fri. Mar 29, 2013 1:30 PM - 3:30 PM PA1 (1st gymnasium)

^○Kohei Higashiyama¹, Eri Takeda², Isamu Kato³ (Waseda Univ.¹, Waseda Univ.², Waseda Univ.³)

Keywords:PL、TEOS