[29p-PA1-1~17] 8. Plasma Electronics

[29p-PA1-5] Plasma Generation by Multipurpose Microwave Antenna and Its Application to Silicon Thin Film Deposition (8.3)

^○Shogo Kondo¹, Suguru Nakano¹, Hirotaka Toyoda^1,2 (Nagoya Univ.¹, Nagoya Univ.²)

Keywords:プラズマCVD