The 60th JSAP Spring Meeting,2013

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Regular sessions(Poster presentation)

22. Joint Session L » 22.1Joint Session L "Basics and applications of MEMS, NEMS: Integration of diverse functionalities"

[29p-PA4-1~11] 22.1Joint Session L "Basics and applications of MEMS, NEMS: Integration of diverse functionalities"

Fri. Mar 29, 2013 1:30 PM - 3:30 PM PA4 (1st gymnasium)

[29p-PA4-10] △Performance Improvement of Micropreconcentrator by Using Split Microstructure

○Naoki Kakita1, Hidetoshi Miyashita1, Satoru Kishida1,2, Sang-Seok Lee1 (Tottori Univ.1, Tottori Univ. Electronic Display Research Center2)

Keywords:MEMS、ガス検出器、予備濃縮器