[29p-PA4-1~11] 22.1Joint Session L "Basics and applications of MEMS, NEMS: Integration of diverse functionalities"

[29p-PA4-2] △Thick film PZT/PZT bimorph structure for MEMS device

^○（B）Junichi Inoue¹, Kensuke Kanda^1,2, Takashi Saito², Takayuki Fujita^1,2, Kazusuke Maenaka^1,2 (Univ. Hyogo¹, JST²)

Keywords:MEMS、PZT/PZTバイモルフ、Actuator