[29p-PA4-1~11] 22.1Joint Session L "Basics and applications of MEMS, NEMS: Integration of diverse functionalities"

[29p-PA4-3] Piezoelectric MEMS accelerometers using tetragonal composition PZT thin films

^○takeshi kobayashi¹, yasuhiro suzuki², natsumi makimoto¹, ryutaro maeda¹, takahiro oikawa³, ayumi wada³, hiroshi funakubo³ (AIST¹, Ibaraki Univ.², Tokyo Tech.³)

Keywords:piezoelectric MEMS