[29p-PA9-1~23] 16.3 Bulk, thin-film and other silicon-based solar cells

[29p-PA9-15] Electrical Property of SiOx film grown by MBE

^○（PC）Miki Fujita^1,2, Tsuyoshi Kitada¹, Minoru Kondoh¹, Atsushi Kawaharazuka^1,2, Yoshiji Horikoshi^1,2 (Waseda Univ.¹, CREST²)

Keywords:SiOx、MBE、solar cell