[29p-PA9-1~23] 16.3 Bulk, thin-film and other silicon-based solar cells

[29p-PA9-16] Si/SiO2 multilayer films deposited by ultrahigh vacuum radio frequency magnetron sputtering method

^○Toshio Takeuchi¹, Atsushi kawaharatuka¹, Miki Fujita¹, Tomoya Inoue¹, Yoshiji Hotikoshi¹ (Waseda University¹)

Keywords:magnetron sputter