The 60th JSAP Spring Meeting,2013

Presentation information

Regular sessions(Poster presentation)

13. Semiconductors A (Silicon) » 13.3 Insulator technology

[29p-PB1-1~20] 13.3 Insulator technology

Fri. Mar 29, 2013 1:30 PM - 3:30 PM PB1 (2nd gymnasium)

[29p-PB1-20] Suppression of Reaction at Au/Ge Interface by Ultra-thin Insulator Insertion and its Correlation with Fermi Level Pinning

Tomonori Nishimura1,2, Kosuke Nagashio1,2, Koji Kita1,2, Akira Toriumi1,2 (The Univ. of Tokyo1, JST-CREST2)

Keywords:フェルミレベルピンニング