[29p-PB4-1~25] 15.6 IV-group-based compounds

[29p-PB4-17] Low Ohmic Resistance Ni Silicide on n+ 4H-SiC by Partial Amorphousization

^○（B）Desilva Milantha¹, Shin-Ichiro Kuroki¹, Tadashi Sato¹ (Hiroshima University¹)

Keywords:オーミックコンタクト