Contact Property of Metal/Crystallized-Phosphorus-doped Amorphous-Si/SiC structure

Presentation information

Regular sessions(Poster presentation)

15. Crystal Engineering » 15.6 IV-group-based compounds

Fri. Mar 29, 2013 1:30 PM - 3:30 PM PB4 (2nd gymnasium)

^○Hiroaki Hanafusa¹, Ryuhei Ashihara¹, Keisuke Maruyama¹, Tsubasa Mizuno¹, Shohei Hayashi¹, Hideki Murakami¹, Seiichiro Higashi¹ (Hiroshima Univ.¹)

Keywords:シリコンカーバイド、アモルファスシリコン、コンタクト