Investigation of Shockley-type stacking faults in 4H-SiC epitaxial layers

Presentation information

Regular sessions(Poster presentation)

15. Crystal Engineering » 15.6 IV-group-based compounds

Fri. Mar 29, 2013 1:30 PM - 3:30 PM PB4 (2nd gymnasium)

^○Yu Nakamura¹, Akira Kiyoi¹, Takanori Tanaka¹, Shigehisa Yamamoto¹ (Mitsubishi Electric Corp.¹)

Keywords:SiC、SF