[29p-PB4-1~25] 15.6 IV-group-based compounds

[29p-PB4-4] △Analysis on generation of local step-bunchings on the 4H-SiC(0001) Si face

^○masayuki sasaki¹, kentaro tamura¹, hideki sako¹, makoto kitabatake¹, kazutoshi kojima^1,2, hirohumi matsuhata^1,2 (FUPET¹, AIST²)

Keywords:半導体