[29p-PB4-1~25] 15.6 IV-group-based compounds

[29p-PB4-8] Theoretical study for diffusion of carbon oxides in SiO₂ during SiC oxidation

^○Toru Akiyama¹, Kohji Nakamura¹, Tomonori Ito¹, Hiroyuki Kageshima², Masashi Uematsu³ (Mie Univ.¹, NTT Basic Res. Labs.², Keio Univ.³)

Keywords:SiC