[30a-B1-1~10] 7.2 Electron microscopes, evaluation, measurement and analysis

[30a-B1-7] Measurement and simulation of fogging electron current in Scanning Electron Microscope (III)

^○（M1）Yasuhiro Ohara¹, Masaru Otani¹, Akira Osada¹, Masatoshi Kotera¹ (Osaka Inst. of Tech.¹)

Keywords:走査電子顕微鏡、フォギング電子