[30a-B1-1~10] 7.2 Electron microscopes, evaluation, measurement and analysis

[30a-B1-8] Measurement of Surface Potential distribution at an Insulator Film Produced by Electron Beam irradiation in Scanning Electron Microscope

^○（M1）Masaru Otani¹, Akira Osada¹, Yasuhiro Ohara¹, Kentaro Kumagai¹, Masatoshi Kotera¹ (Osaka Inst. of Tech.¹)

Keywords:走査電子顕微鏡、フォギング電子、帯電