[30a-D3-1~13] 6.6 Probe microscopy

[30a-D3-2] Fabrication and characterization of alloy incorporated carbon nanofiber probes for magnetic force microscopy by ion irradiation method

^○Soichiro Matsui¹, Masashi Kubota², Kouzi Saida³, Shihomi Tanaka⁴, Masaki Tanemura⁵, Masashi Kitazawa⁶, Ryo Ohta⁷ (Nagoya Inst.¹, Nagoya Inst.², Nagoya Inst.³, Nagoya Inst.⁴, Nagoya Inst.⁵, Olympus Co. Ltd.⁶, Olympus Co. Ltd.⁷)

Keywords:カンチレバー、mems