[30a-F1-1~13] 6.4 New thin-film materials

[30a-F1-10] Optimization of lithium hydride thin film growth conditions

^○Hiroyuki Oguchi¹, Hiroki Kuwano¹, Shin-ichi Orimo², Takeo Ohsawa³, Susumu Shiraki³, Taro Hitosugi³ (Tohoku Univ. Graduate School of Engineering¹, Tohoku Univ. IMR², Tohoku Univ. AIMR³)

Keywords:水化物、薄膜、固体電解質