[30a-F1-1~13] 6.4 New thin-film materials

[30a-F1-6] Fabrication and characterization of Mn₄N epitaxial thin films by pulsed laser deposition

Xi Shen¹, ^○Akira Chikamatsu^1,2, Yasushi Hirose^1,2,3, Tomoteru Fukumura^1,2, Tetsuya Hasegawa^1,2,3 (Univ. of Tokyo¹, JST-CREST², KAST³)

Keywords:マンガン窒化物薄膜、パルスレーザー堆積法