[30a-G12-1~15] 17.1 Growth technology

[30a-G12-7] He/H₂ Plasma Treatment of Cu Substrate for Graphene CVD

^○Ryuichi Kato¹, Kazuo Tsugawa¹, Takatoshi Yamada^1,2, Masataka Hasegawa^1,2 (TASC Graphene Division¹, AIST NTRC²)

Keywords:グラフェン