[30a-G20-1~15] 14.2 Ultrathin films and quantum nanostructures

[30a-G20-11] △Fabrication of Germanium Nano-Structure Using Bio-template and Neutral Beam Etching

^○Mohd Erman Fauzi^1,4, Makoto Igarashi^1,4, Weiguo Hu^1,4, Yosuke Tamura^1,4, Akira Wada¹, Ichiro Yamashita³, Seiji Samukawa^1,2,4 (IFS, Tohoku Univ.¹, WPI-AIMR, Tohoku Univ.², NAIST³, JST-CREST⁴)

Keywords:ゲルマニウム、量子ドット、エッチング