[30a-G20-1~15] 14.2 Ultrathin films and quantum nanostructures

[30a-G20-9] Fabrication of 3 Dimensional Array GaAs Nanodisk Structure Using Bio-template and Neutral Beam Etching

^○Mohd Erman Fauzi^1,5, Yosuke Tamura^1,5, Akio Higo², Yunpeng Wang³, Masakazu Sugiyama⁴, Yoshiaki Nakano³, Seiji Samukawa^1,2,5 (IFS, Tohoku Univ.¹, WPI-AIMR, Tohoku Univ.², RCAST, Univ. of Tokyo³, School of Eng., Univ. of Tokyo⁴, JST-CREST⁵)

Keywords:GaAs、量子ドット、エッチング