[30a-G21-1~11] 15.4 III-V-group nitride crystals

[30a-G21-5] Stress control of GaN films grown on Si(110) substrates

^○Takayuki Kondo¹, Kohei Ueno¹, Jitsuo Ohta¹, Hiroshi Fujioka^1,2 (The Univ. of Tokyo¹, JST-CREST²)

Keywords:歪