Synthesis of Mg2Si by annealing of sputter-deposited Mg film on Si in Ar gas atmosphere

Presentation information

Regular sessions(Oral presentation)

14. Semiconductors B (Exploratory Materials, Physical Properties, Devices) » 14.1 Physical properties of exploratory materials

Sat. Mar 30, 2013 9:00 AM - 11:45 AM G7 (B5 2F-2201)

^○Takashi Ikehata¹, Tatsuya Ando¹, Takuya Yamamoto¹, Yuta Takagi¹, Naoyuki Sato¹, Haruhiko Udono¹ (Ibaraki Univ.¹)

Keywords:マグネシウムシリサイド、薄膜