The 60th JSAP Spring Meeting,2013

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Regular sessions(Oral presentation)

03. Optics » 3.3 Equipment and device optics

[30p-A1-1~5] 3.3 Equipment and device optics

Sat. Mar 30, 2013 1:00 PM - 2:15 PM A1 (K1 B1-B101)

[30p-A1-5] Calculation of Surface Reflectance from Subwavelength Periodic Structure Using RCWA which Changed the Calculation Model

○Akio Mizutani1, Shinji Kameda1, Hisao Kikuta1 (Osaka Prefecture Univ.1)

Keywords:RCWA