[30p-D2-1~8] 4.7 Laser processing

[30p-D2-5] Control of migration of glass elements in the depth direction by multispots' irradiation with femtosecond laser pulses

^○（B）Kouhei Yoshimura¹, Masaaki Sakakura², Toratarou Kurita¹, Yasuhiko Shimotsuma¹, Masahiro Shimizu³, Naoaki Fukuda², Kiyotaka Miura¹ (Kyoto Univ. Eng.¹, Kyoto Univ. SACI², Kyoto Univ. ICR³)

Keywords:フェムト秒レーザー