[30p-G19-1~7] 15.1 Bulk crystal growth

[30p-G19-1] Reduction of carbon impurity in Si crystals grown by infrared convergent heating floating zone (IR-FZ) method

^○Satoshi Watauchi^1,2, Kazuki Yanagimoto¹, Masanori Nagao¹, Isao Tanaka¹, Takashi Watanabe³, Isamu Shindo³ (Univ. of Yamanashi¹, PRESTO-JST², Crystal System Corp.³)

Keywords:浮遊帯域溶融法、シリコン、結晶成長