Novel amidinate cobalt precursor for Metal Organic Chemical Vapor Deposition

Presentation information

Regular sessions(Oral presentation)

13. Semiconductors A (Silicon) » 13.4 Interconnection technology

Sat. Mar 30, 2013 1:30 PM - 3:00 PM G6 (B5 1F-2106)

^○Hidealki Machida¹, Masato Ishikawa¹, Hiroshi Sudoh¹, Kazutoshi Iwai², Yumiko Kawano² (Gas-phase Growth¹, Tokyo Electron²)

Keywords:コバルト、CVD