Symposium

[18p-S1-1~9] Computer Simulations for Plasma Processing (state-of-the-art plasma modelling)

Thu. Sep 18, 2014 1:30 PM - 5:30 PM S1 (S1)

△：Young Scientist Oral Presentation Award Applied
▲：English Presentation
▼：Both Award Applied and English Presentation

1:30 PM - 1:45 PM

[18p-S1-1] Present Situation and Problems in Plasma Simulations

^○Fumiyoshi Tochikubo¹ (Tokyo Metropolitan Univ.¹)

1:45 PM - 2:15 PM

^○Kohki Satoh¹ (Muroran I. T.¹)

2:15 PM - 2:45 PM

^○Toshio Hayashi¹, Kenji Ishikawa¹, Makoto Sekine¹, Masaru Hori¹ (Nagoya University¹)

2:45 PM - 3:15 PM

^○Kouichi Ono¹ (Kyoto Univ.¹)

3:15 PM - 3:30 PM

^○Atsushi Ohtake¹, Kinya Kobayashi¹ (Hitachi Ltd.¹)

Break 15:30～15:45 （3:30 PM - 3:45 PM）

3:45 PM - 4:15 PM

^○Tatsuru Shirafuji¹ (Osaka City Univ.¹)

4:15 PM - 4:45 PM

^○Kazuki Denpoh¹ (Tokyo Electron Yamanashi Ltd.¹)

4:45 PM - 5:15 PM

^○Nobuyuki Kuboi¹, Masanaga Fukasawa¹, Tetsuya Tatsumi¹ (SONY¹)

5:15 PM - 5:30 PM

^○Fumiyoshi Tochikubo¹ (Tokyo Metropolitan Univ.¹)