[18p-S1-1~9] Computer Simulations for Plasma Processing (state-of-the-art plasma modelling)

[18p-S1-4] Modeling and Simulation of Feature Profile Evolution during Plasma Etching

^○Kouichi Ono¹ (Kyoto Univ.¹)

Keywords:プラズマエッチング,表面形状進展,ナノ加工