[17a-A14-1~12] 7.3 Lithography

[17a-A14-11] Homogenization of material composition on the ultra-long overhang nanostructure fabrication by focused-ion-beam chemical vapor deposition

^○Reo Kometani¹, Tadashi Aonuma¹ (The Univ. of Tokyo¹)

Keywords:集束イオンビーム,化学気相成長法,立体ナノ構造