The 75th JSAP Autumn Meeting, 2014

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Oral presentation

07. Beam Technology and Nanofabrication » 7.3 Lithography

[17a-A14-1~12] 7.3 Lithography

Wed. Sep 17, 2014 9:00 AM - 12:30 PM A14 (E305)

12:15 PM - 12:30 PM

[17a-A14-12] Improvement of Positioning Accuracy in Three-Dimensional Electron Beam Writing

○Kenji Yamazaki1, Hiroshi Yamaguchi1 (NTT Basic Research Labs.1)

Keywords:3D,EB,ナノ加工