The 75th JSAP Autumn Meeting, 2014

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Oral presentation

07. Beam Technology and Nanofabrication » 7.3 Lithography

[17a-A14-1~12] 7.3 Lithography

Wed. Sep 17, 2014 9:00 AM - 12:30 PM A14 (E305)

10:30 AM - 10:45 AM

△ [17a-A14-6] Development of Large Reflectometer for EUV Collector Mirrors

○hiraku Hashimoto1, Haruki Iguchi1, Youhei Takahashi1, Masaki Kuki1, Yusuke Tanaka1, Takahiro Fujino1, Tetsuo Harada1, Takeo Watanabe1, Hiroo Kinoshita1 (University of Hyogo1)

Keywords:EUVリソグラフィー,大型反射率計