[17a-A14-1~12] 7.3 Lithography

△ [17a-A14-9] Subjects for Improving Resolution and Homogeneity of Patterns Printed by Scan Projection Exposure Using a Gradient-Index Lens Array

^○Takanori Sato¹, Jun Irisawa², Toshiyuki Horiuti^1,2 (Tokyo Denki Univ¹, Tokyo Denki Univ²)

Keywords:リソグラフィ,屈折率分布型レンズアレイ,走査