[17a-A17-1~13] 15.6 IV-group-based compounds

[17a-A17-13] SiC Heteroepitaxial Growth on AlN/Si by Pulsed Laser Deposition

^○Kazuki Meguro¹, Tsugutada Narita¹, Toshihiro Uemura¹, Hideki Nakazawa¹ (Hirosaki Univ.¹)

Keywords:ヘテロエピタキシー,モノメチルシラン,窒化アルミニウム