[17a-A27-1~11] 14.3/15.4 Code-sharing session

△ [17a-A27-10] CBr₄ flow modulation for forming compositionally-graded InGaAsSb base of InP-based DHBTs

^○(D)Takuya Hoshi^1,3, Norihide Kashio¹, Hiroki Sugiyama¹, Haruki Yokoyama¹, Kenji Kurishima¹, Minoru Ida¹, Hideaki Matsuzaki¹, Masaki Kohtoku¹, Hideki Gotoh^2,3 (NTT Photonics Labs.¹, NTT Basic Research Labs.², Univ. Tsukuba³)

Keywords:インジウムガリウム砒素アンチモン,ヘテロ接合バイポーラトランジスタ,四臭化炭素