The 75th JSAP Autumn Meeting, 2014

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Oral presentation

06. Thin Films and Surfaces » 6.2 Carbon-based thin films

[17a-A8-1~7] 6.2 Carbon-based thin films

Wed. Sep 17, 2014 10:00 AM - 11:45 AM A8 (E207)

10:30 AM - 10:45 AM

[17a-A8-3] Direct wafer fabrication using a high-quality HPHT IIa substrate

○Yoshiaki Mokuno1, Yukako Kato1, Nobuteru Tsubouchi1, Hideaki Yamada1, Akiyoshi Chayahara1, Shinichi Shikata1 (AIST1)

Keywords:ダイヤモンド,CVD