The 75th JSAP Autumn Meeting, 2014

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Oral presentation

15. Crystal Engineering » 15.4 III-V-group nitride crystals

[17a-C5-1~10] 15.4 III-V-group nitride crystals

Wed. Sep 17, 2014 9:00 AM - 11:45 AM C5 (Open Hall)

9:00 AM - 9:15 AM

[17a-C5-1] Growth of hexagonal boron nitride films by low-pressure CVD

○Naoki Umehara1, Atsushi Masuda1, Takaki Shimizu2, Tetsuya Kouno1, Hiroko Kominami1, Kazuhiko Hara3,4 (Shizuoka Univ.1, Shizuoka Univ.2, Shizuoka Univ.3, Shizuoka Univ.4)

Keywords:六方晶窒化ホウ素,CVD,薄膜