[17a-C5-1~10] 15.4 III-V-group nitride crystals

[17a-C5-10] Flip-chip bonding of single crystalline nanocolumn arrays on sputter-deposited AlN/Si (111) to another carrier

^○Hiroaki Hayashi¹, Daisuke Tomimatsu¹, Daishi Fukushima¹, Tomohiro Noma¹, Ichirou Nomura¹, Katsumi Kishino^1,2 (Sophia university¹, Sophia nanotechnology research center²)

Keywords:窒化物,ナノコラム,フリップチップ