The 75th JSAP Autumn Meeting, 2014

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Oral presentation

15. Crystal Engineering » 15.4 III-V-group nitride crystals

[17a-C5-1~10] 15.4 III-V-group nitride crystals

Wed. Sep 17, 2014 9:00 AM - 11:45 AM C5 (Open Hall)

9:30 AM - 9:45 AM

[17a-C5-3] Structural and mechanical characterization of BN films prepared by Reactive Plasma-Assisted Coating (RePAC)—Substrate bias voltage dependence—

○Masao Noma1, Michiru Yamashita2, koji Eriguchi3, Shigehiko Hasegawa4 (SHINKO SEIKI. Co., LTD.1, Hyogo Prefectural Institute of Technology2, Kyoto University3, Osaka University4)

Keywords:窒化ホウ素,基板バイアス,薄膜