9:30 AM - 9:45 AM
[17a-C5-3] Structural and mechanical characterization of BN films prepared by Reactive Plasma-Assisted Coating (RePAC)—Substrate bias voltage dependence—
Keywords:窒化ホウ素,基板バイアス,薄膜
Oral presentation
15. Crystal Engineering » 15.4 III-V-group nitride crystals
Wed. Sep 17, 2014 9:00 AM - 11:45 AM C5 (Open Hall)
9:30 AM - 9:45 AM
Keywords:窒化ホウ素,基板バイアス,薄膜