The 75th JSAP Autumn Meeting, 2014

Presentation information

Poster presentation

08. Plasma Electronics » 8.1 Plasma production and control

[17a-PB1-1~8] 8.1 Plasma production and control

Wed. Sep 17, 2014 9:30 AM - 11:30 AM PB1 (Gymnasium2)

ポスター掲示時間9:30~11:30(PB1会場)

9:30 AM - 11:30 AM

[17a-PB1-1] Development of the RF6kW Compact Thermal Plasma System

Nari Tsutagawa1, Keiichi Misawa1, Yoshitoki Iijima1, Kosuke Suzuki1, Masahumi Hamabe1, Hisashi Komaki1 (JEOL Ltd.1)

Keywords:熱プラズマ