The 75th JSAP Autumn Meeting, 2014

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Oral presentation

03. Optics and Photonics » 3.7 Laser processing

[17a-S9-1~8] 3.7 Laser processing

Wed. Sep 17, 2014 9:30 AM - 11:45 AM S9 (S9)

10:45 AM - 11:00 AM

[17a-S9-5] Application of Periodic Structures Using Femtosecond Laser to Nanoimprinting Method

○Masataka Otsuka1, Toshihiro Somekawa2, Jiro Kawakami1, Kazuaki Nishiyabu1, Yoshinobu Maeda1, Takaomi Matsutani1, Masayuki Fujita2,3, Noriaki Miyanaga3 (Kindai Univ.1, ILT.2, ILE,Osaka Univ.3)

Keywords:フェムト秒レーザー,周期構造,ナノインプリント