The 75th JSAP Autumn Meeting, 2014

Presentation information

Oral presentation

03. Optics and Photonics » 3.7 Laser processing

[17a-S9-1~8] 3.7 Laser processing

Wed. Sep 17, 2014 9:30 AM - 11:45 AM S9 (S9)

10:45 AM - 11:00 AM

[17a-S9-5] Application of Periodic Structures Using Femtosecond Laser to Nanoimprinting Method

Masataka Otsuka1, Toshihiro Somekawa2, Jiro Kawakami1, Kazuaki Nishiyabu1, Yoshinobu Maeda1, Takaomi Matsutani1, Masayuki Fujita2,3, Noriaki Miyanaga3 (Kindai Univ.1, ILT.2, ILE,Osaka Univ.3)

Keywords:フェムト秒レーザー,周期構造,ナノインプリント