[17p-A11-1~17] 6.4 New thin-film materials

[17p-A11-17] Formation of high-density Au nanoparticles with an areal particle density of 10¹²/inch² and improvement in arrangements of order of Au particles by sputtering method

^○Yukiko Yasukawa¹, Xiaoxi Liu², Akimitsu Morisako² (Chiba Inst. Tech.¹, Shinshu Univ.²)

Keywords:金ナノ粒子,自己組織化