The 75th JSAP Autumn Meeting, 2014

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Oral presentation

06. Thin Films and Surfaces » 6.4 New thin-film materials

[17p-A11-1~17] 6.4 New thin-film materials

Wed. Sep 17, 2014 1:15 PM - 6:00 PM A11 (E215)

1:45 PM - 2:00 PM

[17p-A11-3] Sputtering of Lanthanum Titanium Oxide for Optical Thin Films (3)

○(M1)Ryota Nakano1, Hirosi Murotani1 (Course of electro photo optics, Graduate school of engineering, Tokai University1)

Keywords:薄膜,応力,スパッタリング