The 75th JSAP Autumn Meeting, 2014

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Oral presentation

06. Thin Films and Surfaces » 6.4 New thin-film materials

[17p-A11-1~17] 6.4 New thin-film materials

Wed. Sep 17, 2014 1:15 PM - 6:00 PM A11 (E215)

2:15 PM - 2:30 PM

[17p-A11-5] Porosity of yttria films synthesized by flame deposition method

○Tomoyuki Shirai1, Atsushi Nakamura1,2, Shigeo Ohshio1, Ikumi Toda1, Keiji Komatsu1, Hidetoshi Saitoh1 (Nagaoka Univ. Tech.1, Chubu Chelest Co., Ltd2)

Keywords:EDTA,フレームデポジション法,酸化イットリウム