[17p-A14-1~12] Interfacial nano electrochemistry: Research frontiers of semiconductor wetprocesses

[17p-A14-11] Molecular Dynamics Analysis on the Microscopic Behavior of Water and Alcohol near SiO₂ Surface

^○Satoshi Nakaoka¹, Yasutaka Yamaguchi¹, Masayuki Kawakami², Daisaku Yano², Koji Yamanaka² (Osaka Univ.¹, Organo Corp.²)

Keywords:molecular dynamics