The 75th JSAP Autumn Meeting, 2014

Presentation information

Oral presentation

13. Semiconductors A (Silicon) » 13.4 Devices/Integration Technologies

[17p-A16-1~14] 13.4 Devices/Integration Technologies

Wed. Sep 17, 2014 2:00 PM - 5:45 PM A16 (E307)

4:00 PM - 4:15 PM

[17p-A16-9] Improvement of Epitaxial Channel Quality and Its Impact to Tunnel FET Performances

Yukinori Morita1, Takahiro Mori1, Shinji Migita1, Wataru Mizubayashi1, Koichi Fukuda1, Takashi Matsukawa1, Kazuhiko Endo1, Shin-ichi O'uchi1, Yongxun Liu1, Meishoku Masahara1, Hiroyuki Ota1 (AIST1)

Keywords:トンネルFET,TFET,エピタキシャル成長