4:00 PM - 4:15 PM
[17p-A16-9] Improvement of Epitaxial Channel Quality and Its Impact to Tunnel FET Performances
Keywords:トンネルFET,TFET,エピタキシャル成長
Oral presentation
13. Semiconductors A (Silicon) » 13.4 Devices/Integration Technologies
Wed. Sep 17, 2014 2:00 PM - 5:45 PM A16 (E307)
4:00 PM - 4:15 PM
Keywords:トンネルFET,TFET,エピタキシャル成長