[17p-A17-1~14] 15.6 IV-group-based compounds

[17p-A17-9] Wet oxidation of Si thin film on SiC substrates and stability of interfacial structure

^○(PC)Jianbo Liang¹, Tomohiro Hayashi¹, Syouta Nisida¹, Masasi Morimoto¹, Naoteru Shigekawa¹, Mnabu Arai² (Osaka City University¹, New Japan Radio Co., Ltd²)

Keywords:表面活性化ボンディング,4H-SiC,SiOx/SiC