[17p-A19-1~12] Low-Temperature Growth of Group-IV Semiconductors on Insulator -Emerging New Crystallization Techniques -

[17p-A19-11] Stress stimulation effect on Au induced lateral crystallization for amorphous Ge/SiO₂

^○(B)Takatsugu Sakai¹, Kazutoshi Nakashima¹, Kenta Moto¹, Shinichi Motoyama², Yutaka Kusuda², Masahiro Furuta², Nobuyuki Naka³, Tomoko Mumata³, Kenichiro Takakura¹, Isao Tsunoda¹ (KNCT¹, SAMCO², HORIBA³)

Keywords:金属誘起固相成長,応力